Marcel Brill
3Patents
0h-index
14Co-inventors
28Inventor score
Filing activity: Oct 29, 2018 → Jun 19, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US12146125B2 | Use of compositions comprising a solvent mixture for avoiding pattern collapse when treating patterned materials with line-space dimensions of 50 nm or below | Chemistry; Metallurgy | 0 | Active |
| US11970647B2 | Composition, its use and a process for selectively etching silicon-germanium material | Electricity | 0 | Active |
| US11180719B2 | Use of compositions comprising a siloxane-type additive for avoiding pattern collapse when treating patterned materials with line-space dimensions of 50 nm or below | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.