Mark Carruthers
5Patents
1h-index
10Co-inventors
44Inventor score
Filing activity: Jan 26, 2010 → Apr 25, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9165762B2 | Method of depositing silicone dioxide films | Electricity | 1 | Active |
| US10309014B2 | Method of cleaning a plasma processing device | Electricity | 0 | Active |
| US8337675B2 | Method of plasma vapour deposition | Electricity | 0 | Active |
| US11217442B2 | Method of depositing a SiN film | Emerging Cross-Sectional Technologies | 0 | Active |
| US9783886B2 | PE-CVD apparatus and method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.