Markus Hanika
3Patents
1h-index
12Co-inventors
37Inventor score
Filing activity: Jun 29, 2005 → Aug 27, 2010
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8083911B2 | Apparatus for treating a substrate | Electricity | 2 | Active |
| US8980071B2 | Apparatus and method for detecting a state of a deposition apparatus | Electricity | 0 | Active |
| US7575662B2 | Method for operating a sputter cathode with a target | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.