Inventor · Bedford, MA, US

Martin Klein

6Patents
4h-index
6Co-inventors
46Inventor score

Filing activity: Jul 27, 2001 → May 30, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US7100954B2 Ultra-thin wafer handling system Electricity 30 Expired
US6530733B2 Substrate processing pallet and related substrate processing method and machine Emerging Cross-Sectional Technologies 8 Expired
US6682288B2 Substrate processing pallet and related substrate processing method and machine Emerging Cross-Sectional Technologies 8 Expired
US6821912B2 Substrate processing pallet and related substrate processing method and machine Emerging Cross-Sectional Technologies 5 Expired
US10309037B2 Method for producing III-N templates and the reprocessing thereof and III-N template Emerging Cross-Sectional Technologies 1 Active
US10883191B2 Method for producing III-N templates and the reprocessing thereof and III-N template Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.