Martin Klein
6Patents
4h-index
6Co-inventors
46Inventor score
Filing activity: Jul 27, 2001 → May 30, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7100954B2 | Ultra-thin wafer handling system | Electricity | 30 | Expired |
| US6530733B2 | Substrate processing pallet and related substrate processing method and machine | Emerging Cross-Sectional Technologies | 8 | Expired |
| US6682288B2 | Substrate processing pallet and related substrate processing method and machine | Emerging Cross-Sectional Technologies | 8 | Expired |
| US6821912B2 | Substrate processing pallet and related substrate processing method and machine | Emerging Cross-Sectional Technologies | 5 | Expired |
| US10309037B2 | Method for producing III-N templates and the reprocessing thereof and III-N template | Emerging Cross-Sectional Technologies | 1 | Active |
| US10883191B2 | Method for producing III-N templates and the reprocessing thereof and III-N template | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.