Inventor · Shiki, JP

Masami Seki

9Patents
6h-index
17Co-inventors
52Inventor score

Filing activity: Dec 5, 1994 → Sep 30, 2002

Most-cited inventions

PatentTitleAreaCited byStatus
US6204912A Exposure method, exposure apparatus, and mask Physics 44 Expired
US5625436A Scanning type exposure apparatus and exposure method Physics 43 Expired
US5602620A Scanning exposure apparatus and exposure method Physics 42 Expired
US5614988A Projection exposure apparatus and method with a plurality of projection optical units Physics 32 Expired
US5640227A Exposure apparatus and exposure method for minimizing defocusing of the transferred pattern Physics 17 Expired
US5959784A Optical projection systems and projection-exposure apparatus comprising same Physics 12 Expired
US6918413B2 Warp backed weave denim Emerging Cross-Sectional Technologies 6 Expired
USRE37762E1 Scanning exposure apparatus and exposure method General 4 Expired
USRE37361E Scanning type exposure apparatus and exposure method General 1 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.