Inventor · San Jose, CA, US

Maurice E. Ewert

9Patents
4h-index
12Co-inventors
50Inventor score

Filing activity: Sep 23, 2004 → Nov 26, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US7018515B2 Selectable dual position magnetron Electricity 12 Expired
US8404048B2 Off-angled heating of the underside of a substrate using a lamp assembly Electricity 9 Active
US7736473B2 Magnetron having continuously variable radial position Electricity 8 Active
US8685215B2 Mechanism for continuously varying radial position of a magnetron Electricity 4 Active
US9818587B2 Off-angled heating of the underside of a substrate using a lamp assembly Electricity 3 Active
US10504719B2 Cooled reflective adapter plate for a deposition chamber Electricity 2 Active
US9863038B2 Off-angled heating of the underside of a substrate using a lamp assembly Electricity 1 Active
US8992741B2 Method for ultra-uniform sputter deposition using simultaneous RF and DC power on target Electricity 0 Active
US10903067B2 Cooled reflective adapter plate for a deposition chamber Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.