Maurice E. Ewert
9Patents
4h-index
12Co-inventors
50Inventor score
Filing activity: Sep 23, 2004 → Nov 26, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7018515B2 | Selectable dual position magnetron | Electricity | 12 | Expired |
| US8404048B2 | Off-angled heating of the underside of a substrate using a lamp assembly | Electricity | 9 | Active |
| US7736473B2 | Magnetron having continuously variable radial position | Electricity | 8 | Active |
| US8685215B2 | Mechanism for continuously varying radial position of a magnetron | Electricity | 4 | Active |
| US9818587B2 | Off-angled heating of the underside of a substrate using a lamp assembly | Electricity | 3 | Active |
| US10504719B2 | Cooled reflective adapter plate for a deposition chamber | Electricity | 2 | Active |
| US9863038B2 | Off-angled heating of the underside of a substrate using a lamp assembly | Electricity | 1 | Active |
| US8992741B2 | Method for ultra-uniform sputter deposition using simultaneous RF and DC power on target | Electricity | 0 | Active |
| US10903067B2 | Cooled reflective adapter plate for a deposition chamber | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.