Meitoku Aibara
13Patents
3h-index
20Co-inventors
52Inventor score
Filing activity: Nov 20, 2013 → Aug 31, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9953826B2 | Substrate cleaning method, substrate cleaning system, and memory medium | Electricity | 9 | Active |
| US10272478B2 | Substrate processing system, substrate cleaning method, and recording medium | Electricity | 6 | Active |
| US10734255B2 | Substrate cleaning method, substrate cleaning system and memory medium | Electricity | 3 | Active |
| US10121646B2 | Substrate processing apparatus and substrate processing method | Electricity | 2 | Active |
| US9818598B2 | Substrate cleaning method and recording medium | Electricity | 2 | Active |
| US11367630B2 | Substrate cleaning method, substrate cleaning system, and memory medium | Electricity | 1 | Active |
| US9870914B2 | Substrate processing apparatus and substrate processing method | Electricity | 1 | Active |
| US10792711B2 | Substrate processing system, substrate cleaning method, and recording medium | Electricity | 1 | Active |
| US10811283B2 | Substrate cleaning method, substrate cleaning system, and memory medium | Electricity | 1 | Active |
| US11551941B2 | Substrate cleaning method | Electricity | 1 | Active |
| US11600499B2 | Substrate cleaning method, substrate cleaning system, and storage medium | Electricity | 0 | Active |
| US9764345B2 | Substrate processing apparatus and nozzle cleaning method | Electricity | 0 | Active |
| US9768039B2 | Substrate processing apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.