Michael Cooke
7Patents
3h-index
11Co-inventors
54Inventor score
Filing activity: Oct 14, 1980 → Aug 26, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4488506A | Metallization plant | Chemistry; Metallurgy | 348 | Expired |
| US5183402A | Workpiece support | Mechanical Engineering; Lighting; Heating | 13 | Expired |
| US9412566B2 | Methods and apparatus for depositing and/or etching material on a substrate | Electricity | 4 | Active |
| US4475931A | Gas cleaning | Performing Operations; Transporting | 2 | Expired |
| US9793149B2 | Electrostatic clamping method and apparatus | Electricity | 1 | Active |
| US7713377B2 | Apparatus and method for plasma treating a substrate | Electricity | 1 | Expired |
| US10008369B2 | Cyclical plasma etching | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.