Michael Penberth
6Patents
3h-index
3Co-inventors
46Inventor score
Filing activity: Mar 3, 1999 → Aug 28, 2012
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6288406A | Electron beam lithography system having variable writing speed | Electricity | 9 | Expired |
| US6941006B1 | Method and system for calibrating the scan amplitude of an electron beam lithography instrument | Performing Operations; Transporting | 6 | Expired |
| US6278124A | Electron beam blanking method and system for electron beam lithographic processing | Electricity | 4 | Expired |
| US6521896B1 | Blanker assembly employing dielectric material | Electricity | 3 | Expired |
| US8860388B2 | Driver circuit and method of driving a capacitive load | Emerging Cross-Sectional Technologies | 2 | Active |
| US9079396B2 | Method of driving a capacitive load and drive circuit therefor | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.