Blanker assembly employing dielectric material
US6521896B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 1, 2000 |
| Grant date | Feb 18, 2003 |
| Priority date | — |
| Expiry date | Jun 1, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/045
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A blanker assembly for an electron beam column obtains synchronicity between the beam blanking signal propagating through its blanker plates and the associated electron beam which is being blanked. Since the blanking signal travels faster than does the electron beam, the desired synchronicity is achieved by use of a dielectric material for propagating the blanking signal to slow down this signal to match the electron beam velocity. By using a dielectric material for high frequency (RF) blanking signals, there will be less signal reflection and greater blanking accuracy because the electron beam is continuously deflected. The blanker plates each include a substance having a relatively low dielectric constant for proipagating the blanking signal between an upper deflection region. The relative slowness of the propagation of the blanking signal between the upper and lower deflection regions provides a delay effect so as to synchronize the blanking signal with the associated electron beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.