Michael PUGGL
6Patents
2h-index
11Co-inventors
44Inventor score
Filing activity: Jul 3, 2008 → Aug 8, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8596623B2 | Device and process for liquid treatment of a wafer shaped article | Electricity | 6 | Active |
| US8821681B2 | Apparatus and method for wet treatment of disc-like articles | Electricity | 5 | Active |
| US10658204B2 | Spin chuck with concentrated center and radial heating | Electricity | 2 | Active |
| US8997764B2 | Method and apparatus for liquid treatment of wafer shaped articles | Electricity | 2 | Active |
| US9130002B2 | Device for holding wafer shaped articles | Electricity | 0 | Active |
| US8945341B2 | Method and device for wet treatment of plate-like articles | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.