Michael Rumer
5Patents
1h-index
17Co-inventors
44Inventor score
Filing activity: Sep 29, 2000 → Jul 25, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7037830B1 | PVD deposition process for enhanced properties of metal films | Electricity | 27 | Expired |
| US10895539B2 | In-situ chamber clean end point detection systems and methods using computer vision systems | Physics | 1 | Active |
| US10832936B2 | Substrate support with increasing areal density and corresponding method of fabricating | Electricity | 1 | Active |
| US11725285B2 | Preventing deposition on pedestal in semiconductor substrate processing | Electricity | 0 | Active |
| US9938616B2 | Physical vapor deposition of low-stress nitrogen-doped tungsten films | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.