Minoru Soraoka
25Patents
6h-index
20Co-inventors
69Inventor score
Filing activity: Nov 23, 1981 → Feb 16, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5855726A | Vacuum processing apparatus and semiconductor manufacturing line using the same | Emerging Cross-Sectional Technologies | 356 | Expired |
| US6519504B1 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Emerging Cross-Sectional Technologies | 27 | Expired |
| US5861601A | Microwave plasma processing apparatus and method | Electricity | 25 | Expired |
| US4936967A | Method of detecting an end point of plasma treatment | Electricity | 19 | Expired |
| US4453757A | Wafer gripping device | Emerging Cross-Sectional Technologies | 16 | Expired |
| US7335277B2 | Vacuum processing apparatus | Emerging Cross-Sectional Technologies | 8 | Expired |
| US7828928B2 | Vacuum processing apparatus | Emerging Cross-Sectional Technologies | 6 | Active |
| US9620399B2 | Load port | Electricity | 6 | Active |
| US7247207B2 | Vacuum processing apparatus | Emerging Cross-Sectional Technologies | 5 | Expired |
| US6188935A | Vacuum processing apparatus and semiconductor manufacturing line using the same | Emerging Cross-Sectional Technologies | 5 | Expired |
| US6705828B2 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Emerging Cross-Sectional Technologies | 5 | Expired |
| USD546354S1 | Semiconductor manufacturing apparatus | General | 4 | Expired |
| US6752580B2 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Emerging Cross-Sectional Technologies | 2 | Expired |
| US6672819B1 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Emerging Cross-Sectional Technologies | 2 | Expired |
| US6752579B2 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Emerging Cross-Sectional Technologies | 2 | Expired |
| US6526330B2 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Emerging Cross-Sectional Technologies | 2 | Expired |
| US7347656B2 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Emerging Cross-Sectional Technologies | 2 | Expired |
| US6253117A | Vacuum processing apparatus and semiconductor manufacturing line using the same | Emerging Cross-Sectional Technologies | 1 | Expired |
| US6895685B2 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Emerging Cross-Sectional Technologies | 1 | Expired |
| US7833382B2 | Vacuum processing apparatus | Emerging Cross-Sectional Technologies | 1 | Active |
| US6430469B2 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Emerging Cross-Sectional Technologies | 0 | Expired |
| US8460467B2 | Vacuum processing apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
| US6962472B2 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Emerging Cross-Sectional Technologies | 0 | Expired |
| US7201551B2 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Emerging Cross-Sectional Technologies | 0 | Expired |
| US7976632B2 | Vacuum processing apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.