Nadja Schuh
5Patents
2h-index
31Co-inventors
47Inventor score
Filing activity: Sep 27, 2007 → Dec 22, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7916269B2 | Lithographic apparatus and contamination removal or prevention method | Physics | 3 | Active |
| US9599908B2 | Lithographic apparatus and contamination removal or prevention method | Physics | 2 | Active |
| US9158206B2 | Lithographic apparatus and contamination removal or prevention method | Physics | 2 | Active |
| US10908496B2 | Membrane for EUV lithography | Physics | 1 | Active |
| US11762281B2 | Membrane for EUV lithography | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.