Inventor · Tokyo, JP

Natsuyo Morioka

6Patents
4h-index
20Co-inventors
49Inventor score

Filing activity: Sep 3, 1999 → Aug 9, 2007

Most-cited inventions

PatentTitleAreaCited byStatus
US6611728B1 Inspection system and method for manufacturing electronic devices using the inspection system Electricity 32 Expired
US6733618B2 Disturbance-free, recipe-controlled plasma processing system and method Emerging Cross-Sectional Technologies 9 Expired
US7601240B2 Disturbance-free, recipe-controlled plasma processing system and method Emerging Cross-Sectional Technologies 6 Active
US6881352B2 Disturbance-free, recipe-controlled plasma processing method Emerging Cross-Sectional Technologies 6 Expired
US7945410B2 Semiconductor device yield prediction system and method Physics 4 Active
US6916396B2 Etching system and etching method Physics 1 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.