Inventor · Tokyo, JP

Nobuo Shimazu

10Patents
6h-index
10Co-inventors
59Inventor score

Filing activity: Feb 10, 1982 → Jan 22, 2001

Most-cited inventions

PatentTitleAreaCited byStatus
US4980639A Method and apparatus for testing integrated electronic device Physics 37 Expired
US5006795A Charged beam radiation apparatus Electricity 30 Expired
US5097204A Method and apparatus for evaluating the capacitance of an integrated electronic device using an E beam Physics 22 Expired
US4851768A Characteristic test apparatus for electronic device and method for using the same Physics 19 Expired
US5041732A Charged particle beam generating apparatus Electricity 19 Expired
US4443703A Method and apparatus of deflection calibration for a charged particle beam exposure apparatus Electricity 12 Expired
US6444374B1 Manufacturing method of mask for electron beam proximity exposure and mask Emerging Cross-Sectional Technologies 5 Expired
US6727507B2 Electron beam proximity exposure apparatus and method Electricity 3 Expired
US6894295B2 Electron beam proximity exposure apparatus and mask unit therefor Electricity 3 Expired
US6703623B1 Electron beam proximity exposure apparatus Electricity 1 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.