Nobuo Shimazu
10Patents
6h-index
10Co-inventors
59Inventor score
Filing activity: Feb 10, 1982 → Jan 22, 2001
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4980639A | Method and apparatus for testing integrated electronic device | Physics | 37 | Expired |
| US5006795A | Charged beam radiation apparatus | Electricity | 30 | Expired |
| US5097204A | Method and apparatus for evaluating the capacitance of an integrated electronic device using an E beam | Physics | 22 | Expired |
| US4851768A | Characteristic test apparatus for electronic device and method for using the same | Physics | 19 | Expired |
| US5041732A | Charged particle beam generating apparatus | Electricity | 19 | Expired |
| US4443703A | Method and apparatus of deflection calibration for a charged particle beam exposure apparatus | Electricity | 12 | Expired |
| US6444374B1 | Manufacturing method of mask for electron beam proximity exposure and mask | Emerging Cross-Sectional Technologies | 5 | Expired |
| US6727507B2 | Electron beam proximity exposure apparatus and method | Electricity | 3 | Expired |
| US6894295B2 | Electron beam proximity exposure apparatus and mask unit therefor | Electricity | 3 | Expired |
| US6703623B1 | Electron beam proximity exposure apparatus | Electricity | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.