Olga Regelman
10Patents
3h-index
17Co-inventors
53Inventor score
Filing activity: Jan 28, 2005 → Jun 6, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7196283B2 | Plasma reactor overhead source power electrode with low arcing tendency, cylindrical gas outlets and shaped surface | Electricity | 91 | Expired |
| US10312056B2 | Distributed electrode array for plasma processing | Electricity | 35 | Active |
| US7777599B2 | Methods and apparatus for controlling characteristics of a plasma | Electricity | 8 | Active |
| US10418225B2 | Distributed electrode array for plasma processing | Electricity | 3 | Active |
| US9196462B2 | Showerhead insulator and etch chamber liner | Electricity | 1 | Active |
| US8876024B2 | Heated showerhead assembly | Emerging Cross-Sectional Technologies | 1 | Active |
| US10373807B2 | Distributed electrode array for plasma processing | Electricity | 1 | Active |
| US9799491B2 | Low electron temperature etch chamber with independent control over plasma density, radical composition and ion energy for atomic precision etching | Electricity | 1 | Active |
| US9570275B2 | Heated showerhead assembly | Emerging Cross-Sectional Technologies | 0 | Active |
| US10615004B2 | Distributed electrode array for plasma processing | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.