Peter A. Emmi
6Patents
4h-index
13Co-inventors
43Inventor score
Filing activity: Aug 3, 1999 → Jun 22, 2001
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6178660A | Pass-through semiconductor wafer processing tool and process for gas treating a moving semiconductor wafer | Electricity | 43 | Expired |
| US6268621A | Vertical channel field effect transistor | Electricity | 39 | Expired |
| US6488778B1 | Apparatus and method for controlling wafer environment between thermal clean and thermal processing | Emerging Cross-Sectional Technologies | 20 | Expired |
| US6278147A | On-chip decoupling capacitor with bottom hardmask | Electricity | 9 | Expired |
| US6387754B2 | Method of forming an on-chip decoupling capacitor with bottom hardmask | Electricity | 4 | Expired |
| US6758223B1 | Plasma RIE polymer removal | Emerging Cross-Sectional Technologies | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.