Inventor · Radeberg, DE

Peter Frach

5Patents
3h-index
15Co-inventors
54Inventor score

Filing activity: Aug 11, 1997 → Sep 6, 2017

Most-cited inventions

PatentTitleAreaCited byStatus
US6063245A Magnetron sputtering method and apparatus utilizing a pulsed energy pattern Chemistry; Metallurgy 37 Expired
US6005218A Process and circuit for the bipolar pulse-shaped feeding of energy into low-pressure plasmas Electricity 29 Expired
US6132563A Reactive sputtering process Chemistry; Metallurgy 18 Expired
US9994950B2 Method for depositing a piezoelectric film containing AIN, and a piezoelectric film containing AIN Electricity 0 Active
US10407767B2 Method for depositing a layer using a magnetron sputtering device Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.