Peter Westrom
5Patents
1h-index
19Co-inventors
40Inventor score
Filing activity: Oct 6, 2017 → Jan 11, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10643826B2 | Methods for thermally calibrating reaction chambers | Physics | 9 | Active |
| US10943771B2 | Methods for thermally calibrating reaction chambers | Physics | 1 | Active |
| US12057314B2 | Methods for silicon germanium uniformity control using multiple precursors | Electricity | 0 | Active |
| US12362174B2 | Method and wafer processing furnace for forming an epitaxial stack on a plurality of substrates | Electricity | 0 | Active |
| US12428726B2 | Gas injection system and reactor system including same | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.