Philip A. Bottini
7Patents
3h-index
20Co-inventors
53Inventor score
Filing activity: Dec 19, 2007 → May 11, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8999106B2 | Apparatus and method for controlling edge performance in an inductively coupled plasma chamber | Electricity | 41 | Active |
| US8137463B2 | Dual zone gas injection nozzle | Electricity | 29 | Active |
| US9831091B2 | Plasma treating a process chamber | Electricity | 4 | Active |
| US8062472B2 | Method of correcting baseline skew by a novel motorized source coil assembly | Electricity | 2 | Active |
| US10290504B2 | Plasma treating a process chamber | Electricity | 1 | Active |
| US11885021B2 | Gas supply member with baffle | Electricity | 0 | Active |
| US11124878B2 | Gas supply member with baffle | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.