Inventor · Santa Clara, CA, US

Philip A. Bottini

7Patents
3h-index
20Co-inventors
53Inventor score

Filing activity: Dec 19, 2007 → May 11, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US8999106B2 Apparatus and method for controlling edge performance in an inductively coupled plasma chamber Electricity 41 Active
US8137463B2 Dual zone gas injection nozzle Electricity 29 Active
US9831091B2 Plasma treating a process chamber Electricity 4 Active
US8062472B2 Method of correcting baseline skew by a novel motorized source coil assembly Electricity 2 Active
US10290504B2 Plasma treating a process chamber Electricity 1 Active
US11885021B2 Gas supply member with baffle Electricity 0 Active
US11124878B2 Gas supply member with baffle Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.