Gas supply member with baffle

US11124878B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Kartik Shah · Saratoga, US
• Vishwas Kumar Pandey · Savanuru, IN
• Kailash Pradhan · Campbell, US
• Sairaju Tallavarjula · Santa Clara, US
• Rene George · San Jose, US
• Eric Kihara Shono · San Mateo, US
• Philip A. Bottini · Santa Clara, US
• Roger Curtis · Stockton, US

Key dates

• Filing date: Jul 30, 2018
• Grant date: Sep 21, 2021
• Expiry date: Feb 24, 2039

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67126
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A gas supply member includes a first side opposite a second side and an inner surface defining a first opening extending between the first and second sides. The gas supply member includes a third side orthogonal to the first side, the third side includes a first extension that has a face partially defining the second side, and the first extension includes a first plurality of holes extending through the first extension to the face. The gas supply member includes a fourth side opposite the third side, the fourth side includes a protrusion that has a face partially defining the second side. The gas supply member also includes a baffle disposed adjacent to the inner surface, the baffle includes a first portion extending from the inner surface and a second portion attached to the first portion, and the second portion orthogonal to the first portion and parallel to the third side.