Inventor · Dresden, DE

Ralf Zedlitz

5Patents
3h-index
13Co-inventors
43Inventor score

Filing activity: Feb 28, 2001 → Jul 16, 2003

Most-cited inventions

PatentTitleAreaCited byStatus
US6479373B2 Method of structuring layers with a polysilicon layer and an overlying metal or metal silicide layer using a three step etching process with fluorine, chlorine, bromine containing gases Electricity 229 Expired
US7022209B2 PVD method and PVD apparatus Electricity 5 Expired
US6693022B2 CVD method of producing in situ-doped polysilicon layers and polysilicon layered structures Electricity 3 Expired
US6362098B1 Plasma-enhanced chemical vapor deposition (CVD) method to fill a trench in a semiconductor substrate Electricity 2 Expired
US6784553B2 Semiconductor device with self-aligned contact and method for manufacturing the device Electricity 1 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.