Ramakrishna Cheboli
4Patents
3h-index
11Co-inventors
40Inventor score
Filing activity: Apr 16, 2002 → Jan 28, 2005
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7827930B2 | Apparatus for electroless deposition of metals onto semiconductor substrates | Electricity | 14 | Active |
| US6848980B2 | Vibration damping in a carrier head | Performing Operations; Transporting | 11 | Expired |
| US7497767B2 | Vibration damping during chemical mechanical polishing | Performing Operations; Transporting | 4 | Expired |
| US7323058B2 | Apparatus for electroless deposition of metals onto semiconductor substrates | Emerging Cross-Sectional Technologies | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.