Patent · US Expired

Vibration damping in a carrier head

US6848980B2 · kind B2 · utility

11Cited by

42References

13Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Hung Chih Chen · San Jose, US
Steven M. Zuniga · Soquel, US
Ramakrishna Cheboli · Sunnyvale, US

Key dates

Filing date	Apr 16, 2002
Grant date	Feb 1, 2005
Priority date	—
Expiry date	Oct 14, 2022

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB24B37/30
WIPO fieldMachine tools
WIPO sectorMechanical engineering

Abstract

A carrier head has a backing assembly with a substrate support surface, a housing connectable to a drive shaft to rotate with the drive shaft about a rotation axis, and a dampening material in a load path between the backing assembly and the housing. The dampening material reduces transmission of vibrations from the backing assembly to the housing.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.