Raphael Casaes
8Patents
2h-index
22Co-inventors
47Inventor score
Filing activity: Sep 30, 2005 → Feb 22, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10658222B2 | Moveable edge coupling ring for edge process control during semiconductor wafer processing | Electricity | 4 | Active |
| US8525139B2 | Method and apparatus of halogen removal | Electricity | 3 | Active |
| US9029267B2 | Controlling temperature of a faraday shield | Electricity | 2 | Active |
| US7638004B1 | Method for cleaning microwave applicator tube | Chemistry; Metallurgy | 1 | Active |
| US7976641B1 | Extending storage time of removed plasma chamber components prior to cleaning thereof | Chemistry; Metallurgy | 1 | Active |
| US8216388B2 | Extending storage time of removed plasma chamber components prior to cleaning thereof | Chemistry; Metallurgy | 0 | Active |
| US12027410B2 | Edge ring arrangement with moveable edge rings | Electricity | 0 | Active |
| US11798789B2 | Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.