Inventor · Oakland, CA, US

Raphael Casaes

8Patents
2h-index
22Co-inventors
47Inventor score

Filing activity: Sep 30, 2005 → Feb 22, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US10658222B2 Moveable edge coupling ring for edge process control during semiconductor wafer processing Electricity 4 Active
US8525139B2 Method and apparatus of halogen removal Electricity 3 Active
US9029267B2 Controlling temperature of a faraday shield Electricity 2 Active
US7638004B1 Method for cleaning microwave applicator tube Chemistry; Metallurgy 1 Active
US7976641B1 Extending storage time of removed plasma chamber components prior to cleaning thereof Chemistry; Metallurgy 1 Active
US8216388B2 Extending storage time of removed plasma chamber components prior to cleaning thereof Chemistry; Metallurgy 0 Active
US12027410B2 Edge ring arrangement with moveable edge rings Electricity 0 Active
US11798789B2 Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.