Robert Boyd Finlay
4Patents
2h-index
6Co-inventors
37Inventor score
Filing activity: Jun 12, 2003 → Jan 11, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7247209B2 | Dual outlet nozzle for the combined edge bead removal and backside wash of spin coated wafers | Emerging Cross-Sectional Technologies | 6 | Expired |
| US10109046B2 | Methods of detecting faults in real-time for semiconductor wafers | Electricity | 2 | Active |
| US10996564B2 | Uniformity control of metal-based photoresists | Electricity | 2 | Active |
| US10256126B2 | Gas flow process control system and method using crystal microbalance(s) | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.