Robert C. Abbe
13Patents
9h-index
11Co-inventors
69Inventor score
Filing activity: Sep 3, 1974 → Jun 18, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5511005A | Wafer handling and processing system | Electricity | 157 | Expired |
| US4457664A | Wafer alignment station | Emerging Cross-Sectional Technologies | 93 | Expired |
| US4897015A | Rotary to linear motion robot arm | Performing Operations; Transporting | 89 | Expired |
| US3990005A | Capacitive thickness gauging for ungrounded elements | Physics | 39 | Expired |
| US4158171A | Wafer edge detection system | Physics | 30 | Expired |
| US4860229A | Wafer flatness station | Physics | 30 | Expired |
| US4217542A | Self inverting gauging system | Physics | 23 | Expired |
| US4849916A | Improved spatial resolution measurement system and method | Physics | 15 | Expired |
| US4910453A | Multi-probe grouping system with nonlinear error correction | Physics | 11 | Expired |
| US4353029A | Self inverting gauging system | Physics | 8 | Expired |
| US4228392A | Second order correction in linearized proximity probe | Physics | 6 | Expired |
| US7184149B2 | Methods and apparatus for reducing error in interferometric imaging measurements | Physics | 6 | Expired |
| US6255664A | Sensor for measuring degree of flatness | Physics | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.