Inventor · Newton, MA, US

Robert C. Abbe

13Patents
9h-index
11Co-inventors
69Inventor score

Filing activity: Sep 3, 1974 → Jun 18, 2004

Most-cited inventions

PatentTitleAreaCited byStatus
US5511005A Wafer handling and processing system Electricity 157 Expired
US4457664A Wafer alignment station Emerging Cross-Sectional Technologies 93 Expired
US4897015A Rotary to linear motion robot arm Performing Operations; Transporting 89 Expired
US3990005A Capacitive thickness gauging for ungrounded elements Physics 39 Expired
US4158171A Wafer edge detection system Physics 30 Expired
US4860229A Wafer flatness station Physics 30 Expired
US4217542A Self inverting gauging system Physics 23 Expired
US4849916A Improved spatial resolution measurement system and method Physics 15 Expired
US4910453A Multi-probe grouping system with nonlinear error correction Physics 11 Expired
US4353029A Self inverting gauging system Physics 8 Expired
US4228392A Second order correction in linearized proximity probe Physics 6 Expired
US7184149B2 Methods and apparatus for reducing error in interferometric imaging measurements Physics 6 Expired
US6255664A Sensor for measuring degree of flatness Physics 3 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.