Inventor · Burgkirchen an der Alz, DE

Robert Rurlander

4Patents
3h-index
9Co-inventors
39Inventor score

Filing activity: May 7, 1984 → Dec 20, 1990

Most-cited inventions

PatentTitleAreaCited byStatus
US5051117A Process for removing gaseous contaminating compounds from carrier gases containing halosilane compounds Emerging Cross-Sectional Technologies 47 Expired
US4971654A Process and apparatus for etching semiconductor surfaces Electricity 31 Expired
US4539221A Process for the chemical vapor deposition of oxidic particles Chemistry; Metallurgy 4 Expired
US4892568A Process for removing n-type impurities from liquid or gaseous substances produced in the gas-phase deposition of silicon Chemistry; Metallurgy 3 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.