Robert Veltrop
12Patents
8h-index
11Co-inventors
65Inventor score
Filing activity: Dec 6, 1994 → Aug 3, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6583572B2 | Inductive plasma processor including current sensor for plasma excitation coil | Electricity | 420 | Expired |
| US6164241A | Multiple coil antenna for inductively-coupled plasma generation systems | Electricity | 135 | Expired |
| US6463875B1 | Multiple coil antenna for inductively-coupled plasma generation systems | Electricity | 64 | Expired |
| US5589737A | Plasma processor for large workpieces | Electricity | 43 | Expired |
| US6155199A | Parallel-antenna transformer-coupled plasma generation system | Electricity | 39 | Expired |
| US7096819B2 | Inductive plasma processor having coil with plural windings and method of controlling plasma density | Electricity | 34 | Expired |
| US6716758B1 | Aspect ratio controlled etch selectivity using time modulated DC bias voltage | Electricity | 27 | Expired |
| US7271106B2 | Critical dimension control for integrated circuits | Electricity | 9 | Expired |
| US7563723B2 | Critical dimension control for integrated circuits | Electricity | 7 | Active |
| US6527912B2 | Stacked RF excitation coil for inductive plasma processor | Electricity | 3 | Expired |
| US7208407B2 | Flash memory cells with reduced distances between cell elements | Electricity | 2 | Expired |
| US7580279B2 | Flash memory cells with reduced distances between cell elements | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.