Inventor · Campbell, CA, US

Ross Marshall

4Patents
2h-index
17Co-inventors
41Inventor score

Filing activity: Sep 26, 2008 → Dec 7, 2018

Most-cited inventions

PatentTitleAreaCited byStatus
US7732327B2 Vapor deposition of tungsten materials Electricity 48 Active
US9613846B2 Pad design for electrostatic chuck surface Emerging Cross-Sectional Technologies 3 Active
US10388532B2 Methods and devices using PVD ruthenium Electricity 2 Active
US11031273B2 Physical vapor deposition (PVD) electrostatic chuck with improved thermal coupling for temperature sensitive processes Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.