Ross Marshall
4Patents
2h-index
17Co-inventors
41Inventor score
Filing activity: Sep 26, 2008 → Dec 7, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7732327B2 | Vapor deposition of tungsten materials | Electricity | 48 | Active |
| US9613846B2 | Pad design for electrostatic chuck surface | Emerging Cross-Sectional Technologies | 3 | Active |
| US10388532B2 | Methods and devices using PVD ruthenium | Electricity | 2 | Active |
| US11031273B2 | Physical vapor deposition (PVD) electrostatic chuck with improved thermal coupling for temperature sensitive processes | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.