Inventor · Fujisawa, JP

Satomi Hamada

8Patents
4h-index
11Co-inventors
54Inventor score

Filing activity: Sep 20, 1996 → Sep 20, 2018

Most-cited inventions

PatentTitleAreaCited byStatus
US5966765A Cleaning apparatus Electricity 54 Expired
US5860181A Method of and apparatus for cleaning workpiece Electricity 35 Expired
US6106635A Washing method and washing apparatus Emerging Cross-Sectional Technologies 21 Expired
US6221171A Method and apparatus for conveying a workpiece Emerging Cross-Sectional Technologies 6 Expired
US6595220B2 Apparatus for conveying a workpiece Emerging Cross-Sectional Technologies 1 Expired
US11382412B2 Method and apparatus for cleaning PVA brush Performing Operations; Transporting 0 Active
US10229841B2 Wafer drying apparatus and wafer drying method Mechanical Engineering; Lighting; Heating 0 Active
US8608858B2 Substrate cleaning apparatus and method for determining timing of replacement of cleaning member Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.