Satoru Iizuka
5Patents
4h-index
10Co-inventors
43Inventor score
Filing activity: Jul 28, 1998 → Dec 19, 2000
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6380684B1 | Plasma generating apparatus and semiconductor manufacturing method | Electricity | 14 | Expired |
| US6893532B1 | Method and apparatus for processing fine particle dust in plasma | Electricity | 10 | Expired |
| US6238512A | Plasma generation apparatus | Electricity | 7 | Expired |
| US6376796B2 | Plasma processing system | Electricity | 5 | Expired |
| US6835279B2 | Plasma generation apparatus | Electricity | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.