Inventor · Rifu, JP

Satoru Iizuka

5Patents
4h-index
10Co-inventors
43Inventor score

Filing activity: Jul 28, 1998 → Dec 19, 2000

Most-cited inventions

PatentTitleAreaCited byStatus
US6380684B1 Plasma generating apparatus and semiconductor manufacturing method Electricity 14 Expired
US6893532B1 Method and apparatus for processing fine particle dust in plasma Electricity 10 Expired
US6238512A Plasma generation apparatus Electricity 7 Expired
US6376796B2 Plasma processing system Electricity 5 Expired
US6835279B2 Plasma generation apparatus Electricity 2 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.