Sehoon Oh
5Patents
1h-index
10Co-inventors
44Inventor score
Filing activity: Nov 24, 2009 → Feb 18, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8382554B2 | Substrate polishing apparatus and method of polishing substrate using the same | Performing Operations; Transporting | 4 | Active |
| US12327735B2 | Apparatus and method for processing substrate | Electricity | 0 | Active |
| US11835929B2 | Control device for plant and controlling method of the same | Physics | 0 | Active |
| US10005092B2 | Nozzle and substrate treating apparatus including the same | Electricity | 0 | Active |
| US10533904B2 | Elastically actuating device | Mechanical Engineering; Lighting; Heating | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.