Shuichiro Uda
5Patents
1h-index
12Co-inventors
40Inventor score
Filing activity: Nov 17, 2010 → May 11, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9466468B2 | Shower head, plasma processing apparatus and plasma processing method | Chemistry; Metallurgy | 7 | Active |
| US8716144B2 | Method for manufacturing semiconductor device | Electricity | 1 | Active |
| US10910229B2 | Substrate treatment method | Electricity | 0 | Active |
| US11443952B2 | Etching method and etching device | Electricity | 0 | Active |
| US9048191B2 | Plasma etching method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.