Son M. Phi
5Patents
3h-index
17Co-inventors
54Inventor score
Filing activity: Feb 5, 1999 → Feb 27, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6246203A | Direct skew control and interlock of gantry | Emerging Cross-Sectional Technologies | 4 | Expired |
| US6822185B2 | Temperature controlled dome-coil system for high power inductively coupled plasma systems | Electricity | 4 | Expired |
| US11594428B2 | Low temperature chuck for plasma processing systems | Electricity | 3 | Active |
| US12009228B2 | Low temperature chuck for plasma processing systems | Electricity | 0 | Active |
| US11533783B2 | Multi-zone heater model-based control in semiconductor manufacturing | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.