Steve Hansen
10Patents
4h-index
10Co-inventors
57Inventor score
Filing activity: Aug 23, 1996 → Jun 8, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8050898B2 | Method, program product and apparatus for predicting line width roughness and resist pattern failure and the use thereof in a lithography simulation process | Physics | 25 | Active |
| US7292315B2 | Optimized polarization illumination | Physics | 15 | Expired |
| US6553097B2 | X-ray tube anode assembly and x-ray systems incorporating same | Emerging Cross-Sectional Technologies | 7 | Expired |
| US5972442A | Strengthening agent, strengthened metal halide particles, and improved lamp fill material | Emerging Cross-Sectional Technologies | 4 | Expired |
| US7372540B2 | Lithographic apparatus and device manufacturing method | Physics | 2 | Expired |
| US6284165A | Methods of strengthening metal halide particles, and improved lamp fill material | Electricity | 1 | Expired |
| US7710544B2 | Optimized polarization illumination | Physics | 1 | Active |
| US10889509B2 | Ultraviolet light water treatment unit for high flow rate systems | Chemistry; Metallurgy | 0 | Active |
| US8395757B2 | Optimized polarization illumination | Physics | 0 | Active |
| US10386730B2 | Method, program product and apparatus for predicting line width roughness and resist pattern failure and the use thereof in a lithography simulation process | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.