Inventor · Burlington, MA, US

Steven Donnell

6Patents
2h-index
12Co-inventors
44Inventor score

Filing activity: May 13, 2010 → Aug 27, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US8879233B2 Electrostatic chuck with polymer protrusions Electricity 7 Active
US9692325B2 High conductivity electrostatic chuck Electricity 5 Active
US11837492B2 Electrostatic chuck having a gas flow feature, and related methods Electricity 1 Active
US11309207B2 Grounding mechanism for multi-layer for electrostatic chuck, and related methods Electricity 1 Active
US11612972B2 Electrostatic chuck with embossments that comprise diamond-like carbon and deposited silicon-based material, and related methods Performing Operations; Transporting 0 Active
US11742781B2 Electrostatic chuck with charge dissipation coating Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.