Steven Donnell
6Patents
2h-index
12Co-inventors
44Inventor score
Filing activity: May 13, 2010 → Aug 27, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8879233B2 | Electrostatic chuck with polymer protrusions | Electricity | 7 | Active |
| US9692325B2 | High conductivity electrostatic chuck | Electricity | 5 | Active |
| US11837492B2 | Electrostatic chuck having a gas flow feature, and related methods | Electricity | 1 | Active |
| US11309207B2 | Grounding mechanism for multi-layer for electrostatic chuck, and related methods | Electricity | 1 | Active |
| US11612972B2 | Electrostatic chuck with embossments that comprise diamond-like carbon and deposited silicon-based material, and related methods | Performing Operations; Transporting | 0 | Active |
| US11742781B2 | Electrostatic chuck with charge dissipation coating | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.