Steven E. Monahan
3Patents
3h-index
5Co-inventors
39Inventor score
Filing activity: Nov 3, 1986 → Jul 21, 1992
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5299393A | Slurry containment device for polishing semiconductor wafers | Performing Operations; Transporting | 27 | Expired |
| US4810322A | Anode plate for a parallel-plate reactive ion etching reactor | Electricity | 10 | Expired |
| US5279926A | Method and apparatus for removing vapor from a pressurized sprayed liquid in the manufacture of semiconductor integrated circuits | Emerging Cross-Sectional Technologies | 6 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.