Inventor · Georgetown, MA, US

Steven Richards

11Patents
4h-index
12Co-inventors
57Inventor score

Filing activity: Apr 30, 1975 → Jul 20, 2011

Most-cited inventions

PatentTitleAreaCited byStatus
US8101488B1 Hydrogen implantation with reduced radiation Electricity 18 Active
US3994589A Apparatus for determining the position of a surface Physics 12 Expired
US6541780B1 Particle beam current monitoring technique Electricity 11 Expired
US7067829B2 Power sag detection and control in ion implanting system Electricity 7 Expired
US6863736B2 Shaft cooling mechanisms Electricity 4 Expired
US6794662B1 Thermosetting resin wafer-holding pin Electricity 4 Expired
US6661017B1 Ion implantation system having an energy probe Electricity 2 Expired
US6815696B2 Beam stop for use in an ion implantation system Electricity 2 Expired
US8227763B2 Isolation circuit for transmitting AC power to a high-voltage region Electricity 2 Active
US8723452B2 D.C. charged particle accelerator and a method of accelerating charged particles Electricity 1 Active
US8437156B2 Mirror-image voltage supply Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.