Tadashi Aoto
8Patents
3h-index
17Co-inventors
50Inventor score
Filing activity: May 16, 2001 → Sep 5, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6899786B2 | Processing device and method of maintaining the device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanism | Electricity | 25 | Expired |
| US7481903B2 | Processing device and method of maintaining the device, mechanism and method for assembling processing device parts, and lock mechanism and method for locking the lock mechanism | Electricity | 7 | Expired |
| US10153138B2 | Plasma etching apparatus | Electricity | 4 | Active |
| US9589823B2 | Mounting table and plasma processing apparatus | Electricity | 2 | Active |
| US9412635B2 | Electrostatic chuck device | Electricity | 1 | Active |
| US8343372B2 | Surface processing method for mounting stage | Electricity | 0 | Active |
| US9214376B2 | Substrate mounting stage and surface treatment method therefor | Electricity | 0 | Active |
| US7815492B2 | Surface treatment method | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.