Takanori Eto
3Patents
0h-index
7Co-inventors
27Inventor score
Filing activity: Dec 15, 2014 → Sep 10, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9318207B2 | Nonvolatile semiconductor memory device and method of operating the same | Physics | 0 | Active |
| US11810792B2 | Etching method and substrate processing apparatus | Electricity | 0 | Active |
| US11688650B2 | Etching method and substrate processing apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.