Ted Minshall
7Patents
3h-index
17Co-inventors
46Inventor score
Filing activity: Sep 12, 2014 → May 4, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9793096B2 | Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity | Electricity | 13 | Active |
| US9698042B1 | Wafer centering in pocket to improve azimuthal thickness uniformity at wafer edge | Electricity | 7 | Active |
| US10665429B2 | Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity | Electricity | 5 | Active |
| US9920844B2 | Valve manifold deadleg elimination via reentrant flow path | Emerging Cross-Sectional Technologies | 2 | Active |
| US9460915B2 | Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges | Electricity | 1 | Active |
| US9852901B2 | Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges | Electricity | 0 | Active |
| US11127567B2 | Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.