Inventor · Sherwood, OR, US

Ted Minshall

7Patents
3h-index
17Co-inventors
46Inventor score

Filing activity: Sep 12, 2014 → May 4, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US9793096B2 Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity Electricity 13 Active
US9698042B1 Wafer centering in pocket to improve azimuthal thickness uniformity at wafer edge Electricity 7 Active
US10665429B2 Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity Electricity 5 Active
US9920844B2 Valve manifold deadleg elimination via reentrant flow path Emerging Cross-Sectional Technologies 2 Active
US9460915B2 Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges Electricity 1 Active
US9852901B2 Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges Electricity 0 Active
US11127567B2 Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.