Tersem Summan
4Patents
4h-index
17Co-inventors
47Inventor score
Filing activity: Apr 28, 2008 → Jun 28, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9721784B2 | Ultra-conformal carbon film deposition | Electricity | 23 | Active |
| US8679987B2 | Deposition of an amorphous carbon layer with high film density and high etch selectivity | Electricity | 6 | Active |
| US10074534B2 | Ultra-conformal carbon film deposition | Electricity | 5 | Active |
| US8097082B2 | Nonplanar faceplate for a plasma processing chamber | Emerging Cross-Sectional Technologies | 4 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.