Inventor · Tokyo, JP

Tetsuyuki Itakura

5Patents
5h-index
8Co-inventors
45Inventor score

Filing activity: Apr 19, 1999 → Nov 21, 2001

Most-cited inventions

PatentTitleAreaCited byStatus
US6530968B2 Chemical mechanical polishing slurry Chemistry; Metallurgy 41 Expired
US6585568B2 Chemical mechanical polishing slurry Chemistry; Metallurgy 21 Expired
US6444132B1 Free abrasive slurry compositions Physics 8 Expired
US6478834B2 Slurry for chemical mechanical polishing Chemistry; Metallurgy 7 Expired
US6585786B2 Slurry for chemical mechanical polishing Chemistry; Metallurgy 5 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.