Inventor · San Jose, CA, US

Thomas A. Kamp

3Patents
2h-index
8Co-inventors
30Inventor score

Filing activity: Mar 3, 2003 → Jan 25, 2007

Most-cited inventions

PatentTitleAreaCited byStatus
US7098141B1 Use of silicon containing gas for CD and profile feature enhancements of gate and shallow trench structures Electricity 3 Expired
US7186661B2 Method to improve profile control and N/P loading in dual doped gate applications Electricity 2 Expired
US7682980B2 Method to improve profile control and N/P loading in dual doped gate applications Electricity 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.