Thomas C. Hyde
3Patents
3h-index
2Co-inventors
33Inventor score
Filing activity: Jun 20, 1988 → Jan 31, 1992
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5257478A | Apparatus for interlayer planarization of semiconductor material | Performing Operations; Transporting | 212 | Expired |
| US4944119A | Apparatus for transporting wafer to and from polishing head | Performing Operations; Transporting | 59 | Expired |
| US5095661A | Apparatus for transporting wafer to and from polishing head | Performing Operations; Transporting | 51 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.