Tomoki Suemasa
6Patents
3h-index
9Co-inventors
46Inventor score
Filing activity: Jul 21, 1997 → Nov 21, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6089181A | Plasma processing apparatus | Electricity | 116 | Expired |
| US6642149B2 | Plasma processing method | Electricity | 35 | Expired |
| US6670276B1 | Plasma processing method | Electricity | 7 | Expired |
| US7326650B2 | Method of etching dual damascene structure | Electricity | 3 | Expired |
| US9384993B2 | Oxide etching method | Electricity | 3 | Active |
| US9418866B2 | Gas treatment method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.