Toru Azuma
7Patents
6h-index
10Co-inventors
60Inventor score
Filing activity: Apr 21, 1982 → May 28, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4506382A | Apparatus for detecting two-dimensional pattern and method for transforming the pattern into binary image | Physics | 41 | Expired |
| US4479145A | Apparatus for detecting the defect of pattern | Physics | 33 | Expired |
| US4589139A | Apparatus for detecting defects in pattern | Physics | 29 | Expired |
| US6937917B2 | Substrate processing apparatus, operation method thereof and program | Emerging Cross-Sectional Technologies | 21 | Expired |
| US7522823B2 | Thermal processing apparatus, thermal processing method, and substrate processing apparatus | Electricity | 16 | Expired |
| USD968397S1 | Portable computer | General | 10 | Active |
| US4472738A | Pattern testing apparatus | Physics | 5 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.