Inventor · Wakayama, JP

Toshiya Shimada

9Patents
2h-index
17Co-inventors
48Inventor score

Filing activity: May 31, 1995 → Jul 14, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US6410605B1 Process for preparing emulsion Emerging Cross-Sectional Technologies 11 Expired
US9911580B2 Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus Electricity 3 Active
US10763084B2 Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus Electricity 2 Active
US5613848A Process for the production of glass-like carbon substrates for use as recording media and a setter for use in the process Mechanical Engineering; Lighting; Heating 2 Expired
US7691413B2 Composite particle and process for producing the same Chemistry; Metallurgy 1 Active
US11101111B2 Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus Electricity 1 Active
US10403478B2 Plasma processing apparatus and method of manufacturing semiconductor device Electricity 0 Active
US9082797B2 Substrate processing apparatus and method of manufacturing semiconductor device Mechanical Engineering; Lighting; Heating 0 Active
US11948778B2 Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.