Toshiya Shimada
9Patents
2h-index
17Co-inventors
48Inventor score
Filing activity: May 31, 1995 → Jul 14, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6410605B1 | Process for preparing emulsion | Emerging Cross-Sectional Technologies | 11 | Expired |
| US9911580B2 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Electricity | 3 | Active |
| US10763084B2 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Electricity | 2 | Active |
| US5613848A | Process for the production of glass-like carbon substrates for use as recording media and a setter for use in the process | Mechanical Engineering; Lighting; Heating | 2 | Expired |
| US7691413B2 | Composite particle and process for producing the same | Chemistry; Metallurgy | 1 | Active |
| US11101111B2 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Electricity | 1 | Active |
| US10403478B2 | Plasma processing apparatus and method of manufacturing semiconductor device | Electricity | 0 | Active |
| US9082797B2 | Substrate processing apparatus and method of manufacturing semiconductor device | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US11948778B2 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.